Abstract
Atomic layer deposition (ALD) was used to prepare amorphous thin films of Al2O3, Nb2O5, and Ta2O5 on both silicon substrates and aluminum blocks. Etch rates in 10 M NH4OH were determined from X-ray reflectometry data collected as a function of time. Amorphous Al2O3 thin films were found to have an etch rate of 0.5 nm min-1 and an increase in roughness of ∼0.01 nm min-1. Electron microscopy data showed etch pits, consistent with the increase in roughness. Amorphous Nb2O5 and Ta2O5 films showed no appreciable etching or roughening over the course of a ∼500 h continuous immersion. An Nb2O5-coated aluminum block showed no corrosion after immersion in 10 M NH4OH for over 200 h, suggesting that the coatings were pinhole-free. These results suggest that amorphous ALD thin films of Nb2O5 and Ta2O5 are candidates as barrier layers for aluminum in caustic environments.
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