Abstract
The biocompatible thin film metallic glass (TFMGs) materials can be used to modify the substrate material due to their good corrosion resistance and adequate biocompatibility. In this work, five Fe–Zr–Nb TFMGs were fabricated on Si wafer and AISI420 stainless steel disk substrates using three pure targets co-sputtering system. The niobium target power was adjusted to grow TFMGs with different Nb contents ranging from 21.7 to 26.7 at%. Very fine and dense featureless microstructure was discovered for each Fe–Zr–Nb TFMG. The hardness, elastic modulus, H/E and H3/E2 ratios of Fe–Zr–Nb TFMG increased with increasing Nb content. Good adhesion property was revealed for each TFMG. The corrosion resistance of the bare AISI420 stainless steel disk was greatly improved by the deposited Fe–Zr–Nb TFMG. Very good biocompatibility and MG63 cell viability were also found for TFMGs implying their potential application as biomedical materials.
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