Abstract

ABSTRACTIt is known that aluminum will readily form aluminum hydroxide during aqueous exposures. Thick oxide layers with a typical pseudoboehmite (fibre-like network) structure and bayerite crystals were observed on the aluminum metallization after the aqueous cleaning process. The study investigated the effect of a deionized (DI) water cleaning process (recently implemented to replace CFC-based cleaning technology) on the surface chemistry and corrosion behaviour of aluminum wire bond pads. The study also correlated the wire bond yield and oxide thickness with various water cleaning process parameters. The wire bond yield and reliability issues are discussed briefly.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.