Abstract
Thin films of Fe78B13Si9, (similar in chemical composition to Metglas(R) 2605S2) and Fe81B13.5Si3.5C2 (similar to Metglas(R) 2605-SC) with a thickness of approximately 1 μm were deposited by dc magnetron sputtering onto substrates of Si, SiO2, and GaAs. Some of the films were overcoated with approximately 500 Å of Si3N4; others were overcoated with 300 Å of Cr; and others were left uncoated. The samples were exposed to various environments ranging from an air-conditioned laboratory to an outdoor, tropical marine ambient. The morphology, low-frequency magnetic properties, and chemical composition of the films were measured before and after exposure.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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