Abstract
We report a correlation between polarity distribution and piezoelectric response of Li-doped zinc oxide (Zn1-xLixO) films prepared by a facile chemical solution deposition (CSD) method. The correlation supports the importance of controlling the polarity distribution for obtaining high piezoelectric response of ZnO films. Although the Zn1-xLixO films were easily prepared on Inconel substrates by heating randomly-stacked nanoparticle films, Zn0.97Li0.03O and Zn0.94Li0.06O films showed high piezoelectric response of 5.6–5.8 pC/N and high O-polarity distribution ratio of 76–74%. This study presents the CSD method is promising as a low-cost and large-area fabrication method of piezoelectric ZnO films.
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