Abstract
The anodic tantalum oxide films were grown in 5mL/98% H2SO4 electrolyte saturated with additional H2. Discharge currents were collected immediately after growth. The optical properties of these films were studied with a J. V. Woollam Co., Inc., Spectroscopic Ellipsometer, VASE, over a wide range of frequencies from the UV to the IR. It was established that films for which the discharge current followed the known “∼−1” power dependence (characteristic of films that can sustain large electric fields in the range of MV/cm) have different optical properties as compared to films for which the discharge current is not represented by that empirical function. Etching studies of the E-beam deposited Ta2O5 films, combined with reflectance measurements after each etch step, resulted in a shift in the reflectance spectrum as a function of film thickness. This empirical f versus d dependence (where f is the frequency corresponding to the reflectance minimum for each film thickness, d) was used to calculate the energies of the 4d doublet of Ta+5 in Ta2O5.
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