Abstract

Controlled synthesis of core@shell nanoparticles (NPs) for certain applications is a difficult challenge in many nanotechnology projects. In this report, a conventional arrangement composed of a gas aggregation source (GAS) is employed to generate the core NPs, which are subsequently coated by the shell materials in a secondary planar magnetron sputtering. The important difference to the usual system is the application of the two opposing planar magnetrons in a closed field configuration. The prepared core Ag NPs by a GAS are coated/treated by the two magnetrons with Ti targets. Our findings clearly show that the shell thickness can be controlled by tuning the power delivered to the secondary magnetron plasma. Characterizations of the prepared films, by x-ray diffraction technique, disclose multi-crystalline cores covered by amorphous shells. Based on x-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy measurements, different chemistry on the NPs surfaces and volume of the NPs can be achieved by tuning the operation conditions. Furthermore, the thermal annealing process leads to the growth of the crystallite size which results in emerging some microparticles caused by accelerating Ag surface mobility. The employed technique promises a reliable route to synthesize different heterogeneous NPs with stoichiometry tunable in a wide range for multi-functional devices.

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