Conversion of peak/background data for AES and coincidence spectroscopy

Abstract

The peak/background ( P B ) ratios are used in quantitative Auger electron spectroscopy (AES) operated in counting or direct current (dc) mode. The background N b ( E) is displayed in the N( E, E p ) backscattering spectra of electrons. A simple procedure is described for the conversion of N( E, E p1 ) spectra to another primary energy E p2 . It is based on the similar, but material dependent shape of the spectra. They are ‘compressed’ on the energy scale and ‘expanded’ on the intensity scale if E p decreases. The integrated area of the N( E, E p ) spectra is proportional to the backscattering coefficient r B and it varies a little with E p . The conversion of N( E, E p1 ) spectra measured in our laboratory was made on C, Si, Fe, Mo, W and Au samples in the E = 700–3200 eV energy range. It resulted in good agreement with experimental spectra measured at other E p2 energies. The conversion of the P B ratio of the Cu 920 eV Auger peak measured at E p = 9 keV resulted in good agreement with the same determined at 5 keV primary energy, as deducted from the experimental data of Langeron. Some spectra obtained for C, Mo, W and Au samples, are presented for a number of E p values.