Controlled synthesis of periodic arrays of ZnO nanostructures combining e-beam lithography and solution-based processes leveraged by micro X-ray fluorescence spectroscopy

Abstract

In this work, a comprehensive study on how to combine purely chemical, bottom-up solution-based synthesis with advanced e-beam lithography for the controllable production of ZnO-nanostructure periodic arrays on Si and SiO 2 substrates is presented. The study was complemented with micro-X-ray fluorescence spectroscopy demonstrating the latter's great potential as a rapid, non-destructive and enabling nanometrology technique that can leverage the development of novel nanofabrication processes. The study resulted in a fabrication process framework that not only can help in relating the process parameters to the desired geometrical feature of the periodic nanoarchitectures, but that is also compatible with standard microfabrication techniques and large-scale production. • Controllable fabrication of periodic arrays of ZnO nanostructures • Successful merging of low-cost hydrothermal technique with e-beam lithography for the fabrication of periodic ZnO nanostructures • Use of micro-XRF as a non-destructive nanometrology tool leveraging the definition of the process window • Clear definition of process window for cost-efficient production of custom-designed ZnO nanostructure arrays