Abstract
Nanopillar films of Al–Nb alloys have been fabricated on substrates with a regular concavecell structure by oblique angle physical vapor deposition. The concave cell structure of thesubstrate increases the shadow region for the flux of depositing atoms, assisting theformation of an isolated nanopillar on each cell. Depending upon the alloy composition anddeposition angle, the pillar shape changes from horn-like nanopillars through triangularnanoprisms to nanoplates. The Al–Nb alloy nanoplate films with wide gaps betweenplates are of interest as electrodes for capacitor applications. The dielectric oxidefilm formed on the nanoplate film showed a capacitance more than ten timeslarger than that on the respective flat film, due to the enlarged surface area.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
