Abstract
Novel types of three-dimensional (3D) ZnO hybrid nanostructures (HNSs) were successfully prepared via a simple route using a patterned silicon substrate (PSS). In particular, we fabricated floating layers on top of a PSS, suspended structures slung among the protruding patterns, and contacted networks on the surface of the PSS. The character of the one fabricated depended on the drying temperature of the as-prepared structures, which affects the formation of intermediate phases. Bimodal distribution of pore sizes was detected in the porous networks as well. We controlled the size of the pores by adjusting the number of times they were spin coated and the final annealing temperature and time. The 3D ZnO HNS showed enhanced UV sensitivity compared to flat ZnO film prepared by the same process on flat substrate. This result offers a promising pathway to novel porous structures and an effective approach to low-cost sensor devices.
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