Abstract
Three-dimensional (3D) ZnO hybrid nanostructures, composed of a bottom ZnO film, ZnOnanowire arrays, and a top ZnO film, are continuously fabricated by adjustingthe supersaturation conditions, using metal–organic chemical vapour deposition,to utilize the vertically aligned ZnO nanowires as an active element in oxygensensing applications. The oxygen sensing characteristics of the different 3D hybridnanostructures, fabricated to have different average values of radius and length of theZnO nanowire arrays, are studied comparatively without complicated nanowiremanipulation processes. The decrease of the current flow through the ZnO nanowirearrays with increasing ambient oxygen concentration indicates that the 3D hybridnanostructures can be applied in oxygen sensors. In addition, the 3D hybrid nanostructurehaving thinner radius of the nanowire arrays exhibits higher oxygen sensitivity.
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