Controllable synthesization of Au nanoparticles by laser enhanced wet KOH etching process

Abstract

In Si substrate, anisotropic KOH etchants are mainly utilized to form pyramids like on the Si surface . However, this process is not well controlled way owing to the different and random etching pathway. In this work, we applied laser radiation during the anisotropic KOH wet etching process to modifies the topographical properties of Si substrate, as an efficient,simple and low cost texturing process for Si substrate. This approach employs different laser wavelength to modify the topographical features from a crater like structures to Si nanocrystallites in the form of pillars like structures on the Si surface. In order to investigate the formation of plasmonics species, gold nanoparticles was incorporated into Si surfaces by simple ion reduction process. The Si topographical features was studied with atomic scanning microscopy (AFM) images of Si before and after laser irradiation process. The irradiation with 405 laser wavelength, show the formation of thin and high density of Si nano pillars-like structures compared with more thick depther Si nano pillars like structures layer.