Controllable red and blue shifting of InGaAsP quantum well bandgap energy for photonic device integration

Abstract

We demonstrate bandgap tuning of InGaAsP multiple quantum well structures by utilizing an impurity-free vacancy diffusion technique. Substantial modification of the bandgap energy toward the red and blue parts of the spectrum has been observed using SiO2/SiOyNx/SiNx capping layers and by controlling the associated oxygen and nitrogen content. The resulting degree of tuning, up to 120 nm red shift and 140 nm blue shift of the band-to-band wavelength emission, has been studied using room-temperature photoluminescence, in agreement with the emission spectra obtained from semiconductor optical amplifier waveguide strips.