Abstract
Diamond nanopillars can effectively improve the spontaneous emission efficiency and coupling-out efficiency of diamond-color-center single-photon sources. In this paper, a low-cost and controllable method for preparing diamond nanopillar clusters is proposed. By choosing the crystal planting method and adjusting the methane concentration of the grown diamonds, isolated single-crystal diamond particles with a flat surface were prepared. Etching masks with individually controllable diameters and spacings were prepared through the cyclic deposition and dewetting of metal films on the surface of microcrystalline diamond particles. Using inductively coupled reactive ion etching technology, diamond nanopillar clusters were prepared through oxygen plasma etching. The nanopillars were uniform in diameter and densely arranged. The single-crystal properties of the diamond nanopillars and their enhancement effect on the photoluminescence of diamond color centers were confirmed through the analysis of Raman and photoluminescence spectra. The results provide a foundation for the deviceization of diamond-color-center single-photon sources.
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