Abstract
On the basis of analysis for coupling and trajectory assignation of a coarse-fine control system the implementation of a dual stage system for high-speed and ultra-precision linear motion is presented. A permanent-magnet linear synchronous motor drives the coarse stage, which has large workspace with low bandwidth. A voice coil motor drives the fine stage, which has high bandwidth with a small stroke. Close-loop feedback in absolute space is used to realize the coarse-fine control for the dual stage. Inertial force acted on the fine stage can be ignored by using the control scheme. The fine stage tracks desired trajectory, and the coarse stage tracks motion trajectory of the fine stage for preventing motion saturation of the fine stage. The experimental results show that the fine stage improves positioning and tracking precision of the control system effectively and this control scheme can realize high-speed and ultra-precision motion of the dual stage conveniently.
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