A dual-stage control system for high-speed, ultra-precise linear motion

Abstract

Modern manufacturing equipment often requires high-speed and ultra-precise linear motion. For implementing such motion, a coarse–fine dual stage is effective because the coarse stage has a low bandwidth with a large workspace, and in contrast, the fine stage has a high bandwidth with a small stroke. This paper presents the implementation of an air-bearing, dual-stage system and its control strategy. A closed-loop feedback in an absolute space is used to realize coarse–fine control. The fine stage is driven by a voice coil motor that tracks the designed trajectory, while the coarse stage is driven by permanent-magnet linear synchronous motor that tracks the trajectory of the fine stage to prevent its motion saturation. Also analyzed are the coupled dynamics of the air-bearing dual stage driven by a direct-drive motor. Identification and robust control design for the fine stage are introduced in detail. Method tests for the single fine stage are performed, and the results demonstrate that ultra-precision control can be realized for the fine stage. Next, experiments are presented with the dual stage using different loads. Experimental results show that our control strategy can achieve high-speed, ultra-precision linear motion through the dual stage with a satisfactory performance.