Abstract
In this paper, a control method for the power conversion system (PCS) of plasma generators connected with a plasma chamber has been presented. The PCS generates the plasma by applying a high magnitude and high frequency voltage to the injected gasses, in the chamber. With regards to the PCS, the injected gases in the chamber could be equivalent to the resistive impedance, and the equivalent impedance had a wide variable range, according to the gas pressure, amount of injected gases and the ignition state of gases in the chamber. In other words, the PCS for plasma generators should operate over a wide load range. Therefore, a control method of the PCS for plasma generators, has been proposed, to ensure stable and efficient operation in a wide load range. In addition, the validity of the proposed control method was verified by simulation and experimental results, based on an actual plasma chamber.
Highlights
There has been an increasing importance for a cleaning process in a semiconductor or a display manufacturing process, as manufacturing processes have become more precise and require a high yield rate [1,2]
The dry cleaning process requires a plasma generator and it comprises a power conversion system (PCS), which supplies electric power to generate plasma, and a plasma chamber that serves as a load of the PCS
A control algorithm and design for plasma generators with input–parallel and output–series connected inverters were proposed by considering the characteristics of the plasma chamber
Summary
There has been an increasing importance for a cleaning process in a semiconductor or a display manufacturing process, as manufacturing processes have become more precise and require a high yield rate [1,2]. According to the condition of the chamber such as the amount of injected gases, pressure, and plasma ignition states, the required input power of the chamber to be supplied by the PCS varies. The design flexibility was decreased because the hardware design should have changed according to the rated power of the plasma generator The input voltage of a filter network (vTR.S ) was the sum of the secondary side voltages of the transformers, so a high output voltage could be generated, which was supplied to the chamber [16,17,18,19] Another advantage was that, this configuration was not significantly affected by the unbalance between DC-AC inverters.
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