Abstract
The growth of optical layers of SiO2 and Nb2O5 on amorphous substrates is investigated. We develop a kinetic Monte Carlo model which mimics the amorphous structure by randomly fluctuating binding energies. The resulting surface profiles are characterized by their root-mean-square roughness, height–height correlation functions, and growth exponents. For strong random fluctuations, the growth exponents exceed the value of 0.5, in good agreement with experiment.
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