Abstract
The influence of the magnetic field geometry configuration on electron temperature and ion charge state in the vacuum arc ion source has been studied theoretically. It is found that a high value of electron temperature and ionization rate is retained at the exit from the annular anode (where cathodic plasma jet becomes current-free) if a strong magnetic field in the order of 1 T is imposed on this part of jet. It is shown that the maximum value of the mean ion charge can be obtained by imposing on the inter-electrode gap an external magnetic field with the slightly divergent field lines. The divergence angle of the field lines yielding a maximum of ion charge depends on the vacuum arc parameters and usually is in the order of 2–5°.
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