Abstract
The growth of YBaCuO thin films deposited by hollow magnetron sputtering on (100) and (110) SrTiO 3 substrates has been studied as a function of deposition temperature, T s . Besides the substrate orientation T s is the parameter determining the growth direction. On (110) substrates films grow either in the (110) or in the mixed (110)/(013) direction. On (100) substrates c-axis orientation is observed at elevated temperatures ( T s ≈ 780–830°C) while a-axis orientation occurs at lower temperatures ( T s < 720°C). Deviations from oxygen stoichiometry are thought to be the intrinsic parameter controlling the growth.
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