Abstract

ABSTRACTThe change in the behavior of laser—induced etching of Mn—Zn ferrite by MeV ion implantation has been investigated. The etching induced by Ar+ laser irradiation in a H3PO4 solutipn w~s completely suppressed by implanting 3 MeV Au+ to a dose of 1x1016 cm-2 when the laser induced local temperature rise was below the melting point of the ferrite. The etching suppression disappeared when the Au+ implanted sample was thermally annealed at 900 ºC for 30 min. The suppression is found to be related to the crystallinity change induced by ion implantation.

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