Abstract

Microscale backward-facing step flows in transition regime are investigated in the present study using continuum-based Burnett equations. A relaxation method on the Burnett terms is proposed here, and convergent results at Knudsen number up to 0.5 are achieved. The results of Burnett equations agree very well with experimental data and direct simulation Monte Carlo (DSMC) results. The detailed flow characteristics of backward-facing step flow in transition regime are presented, and the difference from macro flow is analyzed. The effects of pressure ratio, Kn, and step ratio are discussed.

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