Abstract

The flow characteristics and heat transfer in micro couette flow were studied numerically using three methods: Burnett equations, direct simulation Monte Carlo (DSMC) method and information preservation (IP) method. The results of these three methods are compared to each other. Convergent solutions to the conventional Burnett equations with second order velocity-slip and temperature-jump boundary conditions were obtained on arbitrary fine numerical grids for all Knudsen numbers (Kn) up to the limit of the equations' validity. The non-dimensional wall shear stress and heat flux shows good agreement with DSMC results and are better than first order slip boundary condition. The velocity slip and temperature jump calculated from Burnett equations fit DSMC results well when Kn < 0.3 but departure at higher Kn number. The IP method shows an identical velocity distribution with DSMC at low speed, but costs much less time. Perfect agreement was achieved in the density, velocity, temperature and pressure distributions between the results of Burnett equations and IP method at Kn = 0.02 and 0.1. Burnett equations and IP method are better than Navier-Stokes equation and DSMC method, respectively, in the flow and heat transfer in MEMS or NEMS systems

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