Abstract

A simple yet scalable strategy for fabricating dry adhesives with mushroom-shaped micropillars is achieved by a combination of the roll-to-roll process and modulated UV-curable elastic poly(urethane acrylate) (e-PUA) resin. The e-PUA combines the major benefits of commercial PUA and poly(dimethylsiloxane) (PDMS). It not only can be cured within a few seconds like commercial PUA but also possesses good mechanical properties comparable to those of PDMS. A roll-type fabrication system equipped with a rollable mold and a UV exposure unit is also developed for the continuous process. By integrating the roll-to-roll process with the e-PUA, dry adhesives with spatulate tips in the form of a thin flexible film can be generated in a highly continuous and scalable manner. The fabricated dry adhesives with mushroom-shaped microstructures exhibit a strong pull-off strength of up to ∼38.7 N cm(-2) on the glass surface as well as high durability without any noticeable degradation. Furthermore, an automated substrate transportation system equipped with the dry adhesives can transport a 300 mm Si wafer over 10,000 repeating cycles with high accuracy.

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