Abstract
In this paper, we present a new contact probe card with an insulating resin film that can achieve large overdrive. The probe pins were manufactured using Be-Cu through etching and silkscreen polyimide printing. It was confirmed that the probes have a long life expectancy because they act within the thresholds of elastic deformation. The proposed assembly technology allows us to achieve highly accurate probe units with a narrow pitch and a probe thickness of only 28 μm.
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