Construction of oxide–carbide artificial superlattices using C 60-assisted pulsed-laser-deposition technique

Abstract

Epitaxially oriented artificial superlattices which consist of an oxide (MgO) and a carbide (TiC) were fabricated on an MgO(0 0 1) substrate using the pulsed-laser-deposition (PLD) technique. TiC layers were fabricated by the PLD of a Ti metal target with a coevaporation of C 60, while the MgO layers were fabricated by the PLD of an MgO target under an oxygen atmosphere. The thickness of each layer was controlled from 20 to 5 atomic layers. X-ray diffraction patterns show defined long-periodic superlattice peaks and satellite peaks at expected diffraction angles. Cross-section transmission electron microscope analysis demonstrates the presence of the alternate stacks of each layer with layer-by-layer crystal growth, while secondary ion mass spectroscope analysis clearly proves the alternate stacks of MgO and TiC layers.