Abstract
As a proof of concept study, a micromachined polysilicon resistor was used as a vacuum pressure sensor. The resistor was heated to incandescence and operated with a constant electrical power input. A photodiode monitored light intensity changes as the pressure of the surrounding nitrogen gas was varied over the pressure range of 10−2–104 Pa. This optical method to measure pressure was nine times more sensitive than one based on electrical resistance variations. This measurement method is thus both more sensitive and it operates over a large pressure range than conventional thermal conductivity sensors.
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