Confocal Scanning Optical Microscope and its Use for Surface Profiling

Abstract

In a con focal optical microscope, the object disappears on defocussing instead of blurring as in the conventional microscope. This allows focussing of the microscope at different planes of the object, thus making it possible to gel 3-D image. This paper reports on the development of a confocal microscope (object scanned) in which the X-Y scanning is done with the help of computer controlled motorized translators. A PZT translator has been designed for vertical scanning for which necessary hardware and software have also been developed. The image is created by point by point scanning of the object and storing the reflected intensity at each point. Results of measurement of depth discrimination of die microscope and imaging of test charts as well as the surface height are presented.