Abstract
We have developed a novel confocal-based imaging sensor for surface characterization. In this case, a tilted-plane technique is incorporated in a confocal imaging system to create a new parallel scanning scheme, enabling the sensor to be designed and developed as a robust and simple configuration. With a tilted disk consisting of in-line pinholes, a motionless parallel z scanning scheme is manifested when the specimen is transversely scanned through the stationary diffraction-foci projecting at different depths. This sensor uses a line scanning approach, so that it is entitled as a Confocal Line Scanning Sensor (CLSS). In this paper, the CLSS principle, the concept of data processing, and major calibration are described. The sensor was first developed as a two-dimensional profiler to cover the measurement ranges of up to 50 μm in depth and up to 15 mm in lateral length. Experimental results were carried out using calibrated specimens for roughness measurement. In this system, the optical lateral resolution is 0.5 μm, and the depth resolution, defined by noise-limited approach, is 15 nm.
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