Abstract
Elastic recoil detection analysis (ERDA) is a well established technique and it offers unique capabilities in thin film analysis. Simultaneous detection and depth profiling of all elements, including hydrogen, is possible only with time-of-flight ERDA. Bragg ionization chambers or ΔE-E detectors can also be used to identify the recoiling element if sufficiently high energies are used. The chief limitations of time-of-flight ERDA are the beam induced sample damage and the requirement of a relatively large accelerator.In this paper we propose a detector setup, which could be used with 3MeV to 6MeV medium heavy beams from either a single ended accelerator (40Ar) or from a tandem accelerator (39K). The detector setup consists of two timing detectors and a gas ionization chamber energy detector. Compared to use of very heavy low energy ions the hydrogen recoils with this beam have sufficient energy to be detected with current gas ionization chamber energy detector. To reduce the beam induced damage the proposed detector setup covers a solid angle larger than 1msr, roughly an order of magnitude improvement over most time-of-flight ERDA setups. The setup could be used together with a small accelerator to be used for light element analysis of approximately 50nm films.The concept is tested with 39K beam from a 1.7MV Pelletron tandem accelerator with the Jyväskylä ToF-ERDA setup. In addition to the measurements effects related to low energies and increase in the solid angle are simulated with Monte Carlo methods.
Accepted Version (Free)
Published Version
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