Abstract
Grating Interferometry, known in the relevant literature as the High Sensitivity Moiré Interferometry, is a method for in-plane displacement and strain measurement. The sensitivity of this method depends on the spatial frequency of the diffraction grating attached to the object under test. For typical specimen grating, with high spatial frequency of 1200 lines per mm, the basic sensitivity is 0.417 µm per fringe. A concept of in-plane displacement sensor based on Grating Interferometry with a stepwise change in sensitivity is presented. It is realized by using the specimen grating with lower spatial frequency. In this case, the grating has more higher diffraction orders and by selecting them appropriately, the sensitivity (chosen from 1.25 μm, 0.625 μm, or 0.417 μm) and the resulting measurement range (chosen from about 600 μm, 300 μm, or 200 μm) can be adjusted to the requirements of a given experiment. A special method of filtration is required in this case. Achromatic configuration with illumination grating was chosen due to its low sensitivity to vibration.
Highlights
IntroductionIt seems that as far as micro-measurements are concerned, two types of sensors are the most strategic: first, microsensors (mainly MEMS, MOEMS, and NEMS) that feature miniature overall dimensions, and second, optical sensors providing the highest sensitivity of measurements and enabling measurements of quantities of very low magnitudes
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. It seems that as far as micro-measurements are concerned, two types of sensors are the most strategic: first, microsensors that feature miniature overall dimensions, and second, optical sensors providing the highest sensitivity of measurements and enabling measurements of quantities of very low magnitudes
For these sensors, a broad scope of sophisticated applications: both in typical areas related to engineering and medicine—as proposed e.g., in [1,2], as well as untypical, like veterinary science—as proposed e.g., in [3]
Summary
It seems that as far as micro-measurements are concerned, two types of sensors are the most strategic: first, microsensors (mainly MEMS, MOEMS, and NEMS) that feature miniature overall dimensions, and second, optical sensors providing the highest sensitivity of measurements and enabling measurements of quantities of very low magnitudes. Such features open, for these sensors, a broad scope of sophisticated applications: both in typical areas related to engineering and medicine—as proposed e.g., in [1,2], as well as untypical, like veterinary science—as proposed e.g., in [3]. This grating, called the specimen grating (SG), is symmetrically illuminated by two mutually coherent beams with plane wave fronts
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
