Concentric circle scanning system for large-area and high-precision imaging.

Abstract

Large-area manufacturing surfaces containing micro- and nano-scale features and large-view biomedical targets motivate the development of large-area, high-resolution and high-speed imaging systems. Compared to constant linear velocity scans and raster scans, constant angular velocity scans can significantly attenuate transient behavior while increasing the speed of imaging. In this paper, we theoretically analyze and evaluate the speed, acceleration and jerks of concentric circular trajectory sampling (CCTS). We then present a CCTS imaging system that demonstrates less vibration and lower mapping errors than raster scanning for creating a Cartesian composite image, while maintaining comparably fast scanning speed for large scanning area.