Abstract
In this study the possibility of hollow cathode discharge for depth profiling of optical waveguides is demonstrated. Planar optical waveguides fabricated by Ag +–Na + and K +–Na + ion exchange processes in glasses are studied. The depth profiles of ion concentrations in these optical waveguides are determined by layer-by-layer emission spectral analysis in hollow cathode plasma. The results agree with ion concentration profiles obtained by method based on refractive index profiles.
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