Concentration Dependence on the Shape and Size of Sol–Gel-Derived Yttria-Stabilized Zirconia Ceramic Features by Soft Lithographic Patterning

Abstract

Typical surface areas of 5 × 5 mm(2) were patterned with high-aspect-ratio micrometer- and submicrometer-sized structures of yttria-stabilized zirconia using a combination of micromolding in capillaries and sol-gel chemistry. The influence of precursor solution concentration and mold geometry on the final shape and dimensions of the patterned structures was investigated. At a precursor concentration of [Zr] = 0.724 mol/dm(3), isolated objects-due to the controlled cracking of patterned films-such as crosses (height 1.4 μm, width 6.0 μm) and "dog bones" (height 800-900 nm, width 900 nm) or patterned films (height 450 nm) were obtained, depending on the mold geometry. Lower precursor concentrations led to differently sized and shaped structures, with changes in dimensions of more than an order of magnitude. Employing a precursor concentration of [Zr] = 0.036 mol/dm(3) yielded isolated rings (height 100-150 nm, line width 20 nm) and squares (height 40 nm, line width 40 nm). A better understanding of the relationship between the precursor concentration, mold geometry, and observed coherent crack patterns in as-dried sol-gel structures may lead to new techniques in patterning isolated features.