Computer simulation of the sputtering of polyatomic multilayered materials with consideration of the spatial overlapping of the collision cascades

Abstract

The special dynamic computer code DYTRIRS for the simulation of the sputtering and modification phenomena in multilayered compound materials under high-fluence ion irradiation was developed on the basis of the Monte Carlo computer code TRIRS for the collision cascade calculation. In the computer simulation technique, the spatial overlap of ion-induced atomic collision cascades in a modified material are taken into account. This simulation technique was tried out on the specially grown multilayered structures. the results of the simulation of the sputtering phenomena of the Fe and Cu targets protected by carbon layer under high fluence ion irradiation are demonstrated.