Abstract
In-flight behavior of micro-nano particles and the interaction between shock wave and particles in a supersonic jet which impinges onto the substrate in a micro space are clarified in detail by computational simulation. The optimal particle diameter for maximum impinging particle velocity exists. Particles smaller than the optimal diameter are decelerated drastically prior to the impact on the cavity as a result of unavoidable particle-shock interaction. The larger deceleration through shockwave is observed with decrease in particle diameter. The particle less than 100 nm cannot penetrate the shockwave and carried by wall jet without impinging on the tooth cavity. The electrostatic force in the vicinity of tooth cavity acts effectively for the acceleration of submicron particles even in the presence of unavoidable shockwave in micro space.
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