Comprehensive Physics of Third Quadrant Characteristics for Accumulation- and Inversion-Channel 1.2-kV 4H-SiC MOSFETs

Abstract

Detailed physics of the third quadrant electrical characteristics of 1.2-kV rated 4H-SiC accumulation (Acc) and inversion (Inv) channel MOSFETs, based on experimentally measured data and TCAD numerical simulations, are described in this paper for the first time. The power MOSFETs with various channel lengths (0.3, 0.5, 0.8, 1.1 $\mu \text{m}$ ) used in this paper were fabricated in a 6-in commercial foundry. Numerical simulations verified that there are two current paths in the third quadrant: 1) through the base region and 2) through the p-n body diode. This paper demonstrates that the Acc MOSFETs have a smaller third quadrant knee voltage ( ${V}_{{\text {knee}}})$ of −1.2 V compared with −1.9 V for the Inv MOSFETs (at ${V}_{g} = {0}$ V and room temperature). Numerical simulations show that this difference is due to a smaller potential barrier for electron transport from the drain to the source in the base region for accumulation channel devices than inversion channel devices. Acc devices are shown to have a lower voltage drop in the third quadrant.