Comprehensive investigation on planar type of Pd–GaN hydrogen sensors

Abstract

Abstract This paper reviews both static and dynamic characteristics of a planar-type Pd–GaN metal–semiconductor–metal (MSM) hydrogen sensor. The sensing mechanism of a metal–semiconductor (MS) hydrogen sensor was firstly reviewed to realize the sensing mechanism of the proposed sensor. Symmetrically bi-directional current–voltage characteristics associated with our sensor were indicative of easily integrating with other electrical/optical devices. In addition to the sensing current, the sensing voltage was also used as detecting signals in this work. With regard to sensing currents (sensing voltages), the proposed sensor was biased at a constant voltage (current) in a wide range of hydrogen concentration from 2.13 to 10,100 ppm H2/N2. Experimental results reveal that the proposed sensor exhibits effective barrier height variations (sensing responses) of 134 (173) and 20 mV (1) at 10,100 and 2.13 ppm H2/N2, respectively. A sensing voltage variation as large as 18 V was obtained at 10,100 ppm H2/N2, which is the highest value ever reported. If an accepted sensing voltage variation is larger than 3 (5) V, the detecting limit is 49.1 (98.9) ppm. Moreover, voltage transient response and current transient response to various hydrogen-containing gases were experimentally studied. The new finding is that the former response time is shorter than the latter one. Other dynamic measurements by switching voltage polarity and/or continuously changing hydrogen concentration were addressed, showing the proposed sensor is a good candidate for commonly used MS sensors.