Abstract
This work presents a new approach to modeling the dynamic behavior of a viscously damped RF-MEMS switch. The model takes into account the effect of squeeze film on resonance frequencies of the switch structure. It also presents a new approach to modeling the impact force as well as its effect on transient pull-in, and release dynamics of the perforated switch membrane. Simulation results of the proposed model are validated against experimental results of the same exact switch, and the comparison was impressive. Model results show that the model is able to capture the experimental behavior of the switch with less than 2% error.
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