Abstract
A three-dimensional modeling network, consisting of different models for describing the behavior of the various species present in a direct current argon glow discharge with copper cathode, has been applied to the Grimm-type glow discharge cell. The modeling results (e.g. the electrical current as a function of pressure and voltage, the potential distribution throughout the discharge, density profiles and energies of the various plasma species, information about collision processes in the plasma and of cathode sputtering) are presented at typical discharge conditions used for glow discharge optical emission spectrometry. The influence of pressure, voltage and current on the calculated results is investigated and a comparison is made with the values obtained in our previous work for typical glow discharge mass spectrometry conditions. The calculation results are compared with experimental data whenever available and in general good agreement is reached, which demonstrates that the models present a realistic picture of the Grimm-type glow discharge.
Published Version
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