Compositional Characterization of Proton-Exchanged Waveguides in LiNbO 3 by Heavy Ion Elastic Recoil Detection

Abstract

Heavy ion elastic recoil detection analysis (HI-ERDA) using 127 I ions as projectiles was applied to the compositional characterization of proton-exchanged (PE) and annealed PE waveguides in LiNbO 3 . In the measurements correlation between the simultaneously determined H and Li concentrations was obtained. In PE waveguides about 85% of Li was substituted by H. The presence of g 1 phase was determined in annealed PE waveguides through complementary X-ray diffraction measurements. From the HI-ERDA data, the stoichiometry of this phase was determined to be H 0.5 Li 0.5 NbO 3 .