Abstract
Cadmium oxide (CdO) films formed by spray pyrolysis and DC reactive magnetron sputtering were analyzed by Rutherford backscattering spectrometry (RBS) and Auger electron spectroscopy (AES). Films formed onto glass and silicon substrates were used in the present investigation. RBS and AES studies clearly indicate that the films formed by both methods are nonstoichiometric with excess cadmium. It has also been found that CdO films formed by spray contain more Cd interstitials than sputtered films.
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