Abstract
In an acceleration sensor, a first vibrator is arranged on a surface of a substrate such that the vibrator can vibrate in an X-axis direction. An angular-velocity-detecting vibrator is arranged inside the first vibrator such that the vibrator can be displaced in a Y-axis direction. A vibration generating unit and a vibration monitor unit are provided between the substrate and the first vibrator. An angular-velocity-detecting displacement detecting unit is provided between the substrate and the angular-velocity-detecting vibrator. A second vibrator is provided outside the first vibrator such that the vibrator can be displaced in the Y-axis direction. An acceleration-detecting displacement detecting unit is provided between the first and second vibrators. An angular velocity detecting circuit detects angular velocity by performing synchronous detection on a displacement detection signal from the displacement detecting unit using a monitor signal from the vibration monitor unit. On the other hand, an acceleration detecting circuit detects acceleration by performing synchronous detection on a displacement detection signal from the displacement detecting unit using a monitor signal from the vibration monitor unit.
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