Complementary analysis of ALE-grown SrS based thin film electroluminescent structures with ion beam methods

Abstract

Ion beam analysis techniques available at low energy accelerators (<10 MV) were utilised in the complementary analysis of thin film electroluminescent (TFEL) structures based on SrS phosphor material. The methods used include backscattering (BS), nuclear resonance broadening (NRB), deuteron induced reactions, elastic recoil detection, particle induced X-ray emission, etc. These methods are characterised by their non-destructive nature, good reproducibility and quantitativity. They were used to determine the depth profiles of the main components in a multilayered structure and also the amounts of impurities or dopants such as hydrogen, carbon, oxygen, fluorine, sodium, manganese and cerium. The capability and accuracy of these methods are discussed in the frame of examples and the analysis of measured spectra.