Abstract
Nanocrystalline Mo films were prepared by magnetron sputtering. Indentation size effect (ISE) on hardness (H) was both studied by constant strain rate method (CSR) and continuous stiffness method (CSM). Inverse ISE appears and H from CSR is higher than that from CSM. Significant dislocation motion barrier effect of increased grain boundary (GB) induces strengthening. Each step of CSM promotes the generation of heterogeneous GBs and enhances GB-emitting dislocations ability, leading to softening.
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