Comparison of plasma etch techniques for III–V nitrides

Abstract

Fabrication of group-III nitride devices relies on the ability to pattern features to depths ranging from ∼1000 Å to >5 μm with anisotropic profiles, smooth morphologies, selective etching of one material over another and a low degree of plasma-induced damage. In this study, GaN etch rates and etch profiles are compared using reactive ion etch (RIE), reactive ion beam etching (RIBE), electron cyclotron resonance (ECR) and inductively coupled plasma (ICP) etch systems. RIE yielded the slowest etch rates and sloped etch profiles despite dc-biases >−900 V. ECR and ICP etching yielded the highest rates with anisotropic profiles due to their high plasma flux and the ability to control ion energies independently of plasma density. RIBE etch results also showed anisotropic profiles but with slower etch rates than either ECR or ICP possibly due to lower ion flux. InN and AlN etch characteristics are also compared using ICP and RIBE.