Abstract
Three independent characterization techniques, Hall effect, neutron activation analysis (NAA) and inductively coupled plasma-mass spectrometry (ICP-MS) were investigated to measure the antimony (Sb) concentration in Sb-doped germanium single crystals. The three LEC grown crystals had initial Sb concentrations ranging from 1×1015 to 1×1017at/cm3. The agreement between these three techniques was very good, averaging 15% below the Hall effect measurements for the ICP-MS measurements and averaging 2% below the Hall effect measurements for the NAA measurements. It was also found that the ICP-MS technique had the least variation among the three techniques.
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