Abstract
Trace-level (20 ppm) H 2S sensing characteristics of two sensor structures (i) bare SnO 2 film (90 nm), and (ii) SnO 2 film (90 nm) loaded with nanolayer (10 nm) of CuO catalyst, prepared using rf sputtering and pulsed laser deposition (PLD) have been investigated. H 2S detection characteristics of bare SnO 2 films is seen to get appreciably enhanced with the introduction of CuO nanolayer in case of both PLD ( S ∼ 147 to 2314) and rf sputtering ( S ∼ 14 to 211). Sensing hetero-structure grown using PLD exhibits good H 2S detection characteristics with higher sensitivity ( S ∼ 2.3 × 10 3) at a low operating temperature of 100 °C.
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