Abstract
An ideal contactless probing system would be relatively easy, inexpensive to operate, and compatible with the existing test equipment. It would not cause any perturbation on the circuit under test and would measure electric signals with minimum cross talk. The bandwidth of the test system for logic signals would be in GHz region, and the method would not be limited to certain materials. This chapter presents a review of state-of-the-art contactless testing methodologies that covered in this text and makes a comparison based on above properties. This will be valuable to readers as contactless probing is gaining more importance as fabrication technologies become smaller and more susceptible to the parasitic impact of mechanical probes.
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